Symbiotic Simulation Control in Semiconductor Manufacturing

Heiko Aydt1, Stephen John Turner1, Wentong Cai 1, Malcolm Yoke Hean Low1, Peter Lendermann2, and Boon Ping Gan2

1School of Computer Engineering, Nanyang Technological University, Singapore 639798
aydt@ntu.edu.sg
assjturner@ntu.edu.sg
aswtcai@ntu.edu.sg
yhlow@ntu.edu.sg

2D-SIMLAB Technologies Pte Ltd, 30 Biopolis Street #09-02, Matrix, Singapore 138671
peter@d-simlab.com
boonping@d-simlab.com

Abstract. Semiconductor manufacturing is a highly complex and asset intensive process. Solutions are needed to automate control of equipment and improve efficiency. We describe a symbiotic simulation control system which uses reactive what-if analysis to find a stable configuration of a wet bench tool set. This control system is based on a generic framework for symbiotic simulation. We show that symbiotic simulation can be used to make control decisions in near real-time. Furthermore, we show that our approach yields a notable performance improvement over common practise.