Heiko Aydt1, Stephen John Turner1, Wentong Cai 1, Malcolm Yoke Hean Low1, Peter Lendermann2, and Boon Ping Gan2
1School of Computer Engineering, Nanyang Technological University, Singapore 639798
2D-SIMLAB Technologies Pte Ltd, 30 Biopolis Street #09-02, Matrix, Singapore 138671
Abstract. Semiconductor manufacturing is a highly complex and asset intensive process. Solutions are needed to automate control of equipment and improve efficiency. We describe a symbiotic simulation control system which uses reactive what-if analysis to find a stable configuration of a wet bench tool set. This control system is based on a generic framework for symbiotic simulation. We show that symbiotic simulation can be used to make control decisions in near real-time. Furthermore, we show that our approach yields a notable performance improvement over common practise.